LAM 839-800327-315 Electrostatic Chuck, Precision Control Module
The LAM 839-800327-315 Electrostatic Chuck Module provides precise control over semiconductor materials during manufacturing processes. It ensures stable clamping force for improved production efficiency and quality.
Manufacturer:LAM
Model Number:839-800327-315
Module Type:Electrostatic Chuck
Clamping Force Range:50-200 N
Operating Voltage:100-240V AC
Frequency:50/60Hz
Power Consumption:50W
Operating Temperature:-20°C to +80°C
Material:Advanced Ceramic
The LAM 839-800327-315 Electrostatic Chuck offers unparalleled precision and stability, crucial for the success of semiconductor fabrication processes.
Built with advanced materials and state-of-the-art technology, this chuck ensures long-lasting performance under rigorous conditions.
With its high clamping force and rapid clamping time, it significantly enhances productivity by minimizing downtime and reducing process variability.
The compact design allows for easy installation and integration into existing systems without major modifications.
Compliant with international safety and quality standards, the LAM 839-800327-315 Electrostatic Chuck guarantees a safe working environment and reliable operation.
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